We understand that target designs are ever changing, so one of the easiest ways to make targets is to take advantage of the silicon industry and make your targets the same way that the chips in your computer and phone are made out of.
There are several advantages of silicon wafer based targets:
- The substrate that the targets are built on are extremely flat, hence reflective diagnostics are very effective and particle beam creation is very smooth
- Feature sizes can be as small as tens of nanometers
- Target thicknesses can be as thin as tens of nanometers and as thick as several hundred microns
- You can coat almost any type of materials to create spectrometric signatures